Research on a Semiconductor Factory Environmental Safety Monitoring System Based on InAs/GaSb Type-II Superlattice Infrared Detection Technology

Abstract

With the rapid development of the semiconductor manufacturing industry, the large quantities of high-risk chemicals, specialty gases, and precision equipment involved in its production processes have brought severe industrial safety challenges. Traditional safety monitoring methods have limitations in sensitivity, response speed, and adaptability to complex environments. Based on InAs/GaSb type-II superlattice infrared detection technology, this paper discusses a smart safety monitoring system for semiconductor factories. The paper first analyzes the typical safety risks and detection requirements in semiconductor manufacturing scenarios; second, it explains the physical advantages of type-II superlattice materials in the field of infrared detection and their application principles in gas leak detection; on this basis, it designs a smart monitoring system architecture of "infrared detection + AI analysis"; finally, it looks ahead to the application prospects of this technology in the field of industrial safety. This study aims to transform cutting-edge semiconductor optoelectronic technology into industrial safety productivity and provide new ideas for the intrinsic safety of semiconductor factories.